Lam Research 810-069751-201

Product Introduction

The Lam Research 810-069751-201 is a specialized Node Board, Type 27, associated with the 50020R-10 control architecture. Parts references consistently identify this assembly as “PCB, Node Board, Type 27, 50020R-10.” Some available units are also identified as Rev B.

The board is used within Lam Research semiconductor manufacturing equipment and forms part of the electronic control and communication infrastructure. It is particularly associated with equipment configurations that use the Jetstream gas box architecture.

Identification Details

The main identification information for this board includes:

• Manufacturer: Lam Research
• Part Number: 810-069751-201
• Board Type: Node Board Type 27
• Associated Platform / Reference: 50020R-10
• Known Revision: Rev B
• Board Category: Equipment control / node interface PCB
• Application: Semiconductor manufacturing equipment

The complete 810-069751-201 number should be used when sourcing a replacement because Lam Research has multiple node-board families with different type numbers and functions.

Node Board Function

A node board serves as an electronic interface within a distributed equipment-control system. It can provide connections between local equipment devices and the wider control architecture, allowing information and control signals to move between different sections of the tool.

For semiconductor manufacturing equipment, this type of architecture helps separate control functions into dedicated modules. Consequently, a node board can simplify system integration while supporting communication between field-level components and higher-level controllers.

The 810-069751-201 should therefore be considered a system-specific control board rather than a general-purpose industrial I/O module.

50020R-10 Architecture

The 50020R-10 reference is repeatedly associated with the 810-069751-201 Type 27 Node Board. Other Lam Research parts using the same 50020R-10 architecture include different node and LonWorks-related boards, indicating that this reference belongs to a broader equipment control configuration.

In addition, equipment spare-parts records list 810-069751-201 together with 810-073479-005, described as a Jetstream Gas Box Main Board and Node Board Type 27 combination. This provides useful context when identifying the board in a complete gas-box assembly.

Application in Semiconductor Equipment

The 810-069751-201 is intended for specialized Lam Research equipment rather than standalone automation applications.

Its potential maintenance environment includes:

• Semiconductor process equipment
• Jetstream gas box systems
• Equipment control assemblies
• Distributed electronic control systems
• Node and communication architectures
• Semiconductor equipment refurbishment
• OEM spare-parts replacement

The exact equipment model should still be confirmed before installation because Lam Research tools can have different hardware configurations.

Inspection Points

When evaluating a used or refurbished 810-069751-201, technicians should inspect the complete PCB before installation.

Important points include:

• Part-number label
• Hardware revision
• PCB condition
• Connector condition
• Component damage
• Signs of overheating
• Corrosion or contamination
• Loose or damaged hardware
• Evidence of previous repair

Available inventory listings show this part in new, used, and parts-only conditions, so condition verification is particularly important when purchasing from surplus inventory.

Replacement Guidelines

Before replacing the board, verify the complete 810-069751-201 part number and compare the revision with the original unit. A current listing specifically identifies a Rev B version, so revision matching should not be overlooked.

The technician should also confirm connector arrangement, mounting configuration, associated node-board architecture, and the equipment's existing control configuration.

After installation, the equipment should be powered up following the applicable Lam Research service procedure. Communication and relevant system functions should be checked before the tool is returned to production.

Reliable Spare-Part Solution

The Lam Research 810-069751-201 Type 27 Node Board is an important electronic spare for compatible semiconductor manufacturing equipment. Its association with the 50020R-10 architecture and Jetstream gas-box-related systems makes exact part-number identification essential.

We supply Lam Research 810-069751-201 for semiconductor equipment maintenance, repair, replacement, and refurbishment. When requesting this board, providing the complete part number, revision, and equipment information can help ensure the correct configuration is supplied.

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